Neural selection of the optimal optical signature for a rapid characterization of a submicrometer period grating
Robert, S. ; Mure-Ravaud, A. ; Yacoub, Meziane ; Thiria, Sylvie ; Badran, Fouad
HAL, hal-01125502 / Harvested from HAL
The characterization of gratings with small period-to-wavelength ratios can be achieved by solving the inverse problem of the diffraction. The use of a neural network has shown several advantages: it is a non-destructive, non-local and non-invasive method. However, although the calculation of results is instantaneous, the neural characterizations already published require the measurement of many diffracted intensities and can so need a long measurement time. We present, in this paper, a neural selection process called heuristic variable selection. This method reduces the number of diffractive efficiencies allowing a correct reconstruction of the profile shape according to an expected accuracy. In the same way, the non-redundancy of the data composing the optical signature is ensured. We relate a 1-�m period grating etched in silicon which could be characterized with only six measurements when a trapezoidal profile shape is assumed.
Publié le : 2004-07-04
Classification:  [INFO]Computer Science [cs],  [MATH.MATH-ST]Mathematics [math]/Statistics [math.ST]
@article{hal-01125502,
     author = {Robert, S. and Mure-Ravaud, A. and Yacoub, Meziane and Thiria, Sylvie and Badran, Fouad},
     title = {Neural selection of the optimal optical signature for a rapid characterization of a submicrometer period grating},
     journal = {HAL},
     volume = {2004},
     number = {0},
     year = {2004},
     language = {en},
     url = {http://dml.mathdoc.fr/item/hal-01125502}
}
Robert, S.; Mure-Ravaud, A.; Yacoub, Meziane; Thiria, Sylvie; Badran, Fouad. Neural selection of the optimal optical signature for a rapid characterization of a submicrometer period grating. HAL, Tome 2004 (2004) no. 0, . http://gdmltest.u-ga.fr/item/hal-01125502/