@article{RSA_2004__52_1_5_0,
author = {Le Gall, Caroline},
title = {Comparaison de diff\'erentes analyses statistiques spatiales pour d\'etecter une d\'efaillance dans la fabrication de circuits int\'egr\'es},
journal = {Revue de Statistique Appliqu\'ee},
volume = {52},
year = {2004},
pages = {5-37},
language = {fr},
url = {http://dml.mathdoc.fr/item/RSA_2004__52_1_5_0}
}
Le Gall, Caroline. Comparaison de différentes analyses statistiques spatiales pour détecter une défaillance dans la fabrication de circuits intégrés. Revue de Statistique Appliquée, Tome 52 (2004) pp. 5-37. http://gdmltest.u-ga.fr/item/RSA_2004__52_1_5_0/
, et (2001), Markov Random Fields in Pattern Recognition for Semiconductor Manufacturing. Technometrics, vol. 43, n° 1, pp. 66-72. | MR 1847780 | Zbl 1072.60502
(1974), Spatial Interaction and the Statistical Analysis of Lattice Systems. Journal of the Korean Statistical Society, vol. 2, pp. 192-236. | MR 373208 | Zbl 0327.60067
, , et (1984), Classification and Regression Trees. Wadsworth & Brooks. | Zbl 0541.62042
, (1981), Spatial Processes, Models and Applications, London: Pion Limited. | MR 632256 | Zbl 0598.62120
(1992), On Consistency of a Class of Estimators for Exponential Families of Markov Random Fields on the Lattice. The Annals of Statitics, vol. 20, pp. 455-468. | MR 1150354 | Zbl 0787.62100
(1991), Statistics for Spatial Data. New York, Wiley. | MR 1127423 | Zbl 0799.62002
(1999), Automatic Detection of Spatial Signature on Wafermaps in a High Volume Production. Internal Symposium on Defect and Fault Tolerance in VLSI Systems, pp. 61-66.
, et (1997), Monitoring Wafer Map Data From Integrated Circuit Fabrication Processes for Spatially Clustered Defects. Technometrics, vol. 39, n° 3, pp. 241-253. | Zbl 0891.62074
, , et (1997b), Model-Free Estimation of Defect Clustering in Integrated Circuit Fabrication. IEEE Transactions on Semiconductor Manufacturing, vol. 10, n° 3, pp. 344-359.
, , (1996), Sequential Screening in Semiconductor Manufacturing, I : Exploiting Spatial Dependence. Operations Research, vol. 44, pp. 173-195. | Zbl 0847.90071
(1948), The Interpretation of Statistical Maps. Journal of the Royal Statistical Society, Series B, vol. 10, pp. 243-251. | MR 29115 | Zbl 0035.08304
, , Jr (1977), Modification of Poisson statistics : Modeling defects induced by diffusion. IEEE Journal of Solid-State Circuits, vol. SC-12, pp. 540-546.
, , et (1983), Integrated Circuit Yield Statistics. Proceeding of the IEEE, vol. 71, n° 4, pp. 453-470.